Skin-Effect Self-Heating in Air-Suspended RF MEMS Transmission-Line Structures

RF Modeling for FDSOI MOSFET and Self Heating Effect on RF Parameter Extraction

In this paper, a BSIMSOI RF gate resistance model for FDSOI MOSFET is introduced and verified. With the addition of the gate resistance model, the RF characteristic of FDSOI MOSFET could be modeled well. Self-heating effect (SHE) will affect RF data fitting significantly. A simple method to extract thermal resistance is proposed.

Tunable Band-pass Filter Using Rf Mems Capacitance and Transmission Line

In this paper we present the design and fabrication of an RF MEMS tunable band-pass filter. The band-pass filter design uses both distributed transmission lines and RF MEMS capacitances together to replace the lumped elements. The use of RF MEMS variable capacitances gives the flexibility of tuning both the centre frequency and the band-width of the band-pass filter. A prototype of the tunable ...

Analysis of a MEMS Transmission Line

A microelectromechanical system (MEMS) sound waveguide is considered as a transmission line for RF signals. We analyze a device geometry of a straight one-dimensional microsize silicon rod, where a longitudinal acoustic wave is generated and detected using capacitive transducers. Linear, isotropic, and nondispersive acoustic-wave propagation is assumed. Based on the calculation of the electrome...

Two Novel Structures for Tunable Mems Capacitor with Rf Applications

Abstract—Two novel structures for high-Q MEMS tumble capacitors are presented. The proposed designs include full plate as well as the comb structured capacitors. They can be fabricated employing surface micromachining technology which is CMOS-compatible. The structures do not require the cantilever beams which introduce considerable series resistance to the capacitor and decrease the quality fa...

Impact of Skin Effect on Thermal Behavior of Rf Mems Switches